Effect of a funnel-shaped radiation shield on the characteristics of a silicon cz furnace

Koji Honda, Nobuyuki Imaishi, Takao Tsukada, Mitunori Hozawa

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

For the 6” silicon CZ system, effects of a funnel-shaped radiation shield on the temperature profiles in the melt and crystal, the melt/crystal interface shape and also the distribution of the thermal stresses were investigated theoretically by the finite element analysis based on the conduction-dominated model. It is found that a funnel-shaped radiation shield can make the melt/crystal interface less convex to the crystal (relatively flatter), providing a higher pull rate and smaller thermal stresses in the crystal compared with other radiation shield geometries, such as a doughnut (torus) shape. Also, the principal operating conditions in the CZ system, such as the crucible temperature, can be changed widely by selecting the emissivity and/or thickness of the shield.

Original languageEnglish
Pages (from-to)84-89
Number of pages6
JournalJOURNAL of CHEMICAL ENGINEERING of JAPAN
Volume25
Issue number1
DOIs
Publication statusPublished - 1992 Jan 1

Keywords

  • Crystal Growth
  • Czochralski Method
  • Finite Element Analysis
  • Radiation Heat Transfer
  • Silicon
  • Single Crystal
  • Thermal Stress

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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