ECS Transactions: Preface

C. L. Claeys, H. Iwai, M. Tao, J. Murota, S. Deleonibus

Research output: Contribution to journal › Editorial › peer-review

Original language	English
Pages (from-to)	iii
Journal	ECS Transactions
Volume	25
Issue number	7
Publication status	Published - 2009
Externally published	Yes
Event	ULSI Process Integration 6 - 216th Meeting of the Electrochemical Society - Vienna, Austria Duration: 2009 Oct 4 → 2009 Oct 9

ASJC Scopus subject areas

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title = "ECS Transactions: Preface",

author = "Claeys, {C. L.} and H. Iwai and M. Tao and J. Murota and S. Deleonibus",

year = "2009",

language = "English",

volume = "25",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

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note = "ULSI Process Integration 6 - 216th Meeting of the Electrochemical Society ; Conference date: 04-10-2009 Through 09-10-2009",

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AU - Claeys, C. L.

AU - Iwai, H.

AU - Tao, M.

AU - Murota, J.

AU - Deleonibus, S.

PY - 2009

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Y2 - 4 October 2009 through 9 October 2009

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