Dynamic response of an air-bearing displacement sensor for on-machine surface form measurement

Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the dynamic response of an air-bearing displacement sensor for on-machine surface form measurement of micro structures. The on-machine measurement system has some merits in terms of measurement efficiency and re-machining for error compensation after measurement. On the other hand, the performance of the contact type measurement system based on stylus methods is dominated by the dynamic characteristics of the system because the system is subject to random vibrations of the machine tool including the spindle during measurement. Therefore, the dynamic response of the system is useful for analyzing the mechanical vibrations of the practical on-machine measurement system. In this paper, the equation of motion for the air-bearing displacement sensor to the excited input displacement is derived and the displacement behavior of the system by using a PZT actuator is investigated within certain frequency ranges experimentally for identifying the dynamics of the system.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Pages836-841
Number of pages6
ISBN (Print)9783037855096
DOIs
Publication statusPublished - 2012 Jan 1
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period12/11/812/11/10

Keywords

  • Air-bearing
  • Displacement sensor
  • Dynamic response
  • Measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Lee, K. W., Ito, S., Shimizu, Y., Gao, W., Tanaka, K., Fukuta, M., & Kai, Y. (2012). Dynamic response of an air-bearing displacement sensor for on-machine surface form measurement. In Emerging Technology in Precision Engineering XIV (pp. 836-841). (Key Engineering Materials; Vol. 523-524). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.523-524.836