Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning

Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita

Research output: Contribution to journalArticlepeer-review

51 Citations (Scopus)

Abstract

This paper discusses dynamic modeling, controller design and experimental validation for development of a three degree of freedom (DOF) planar motion stage for precision positioning in the XY directions. A model of the stage dynamics was first identified for the purpose of controller design using the results of step response tests. A proportional integral derivative (PID) feedback control with disturbance observer was then designed and implemented using an analytical method. We discuss the policy for PID controller tuning to achieve the most desirable performance. In addition, a feed-forward control consisting of a simple predictor was added to reduce tracking error. Experimental results show that the developed controller provides fast positioning with less tracking error than a simple PID controller and is suitable for precise positioning of multi-DOF stage system.

Original languageEnglish
Pages (from-to)263-271
Number of pages9
JournalPrecision Engineering
Volume29
Issue number3
DOIs
Publication statusPublished - 2005 Jul

Keywords

  • Controller
  • Planar motion stage
  • Precision positioning
  • Surface encoder

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint

Dive into the research topics of 'Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning'. Together they form a unique fingerprint.

Cite this