Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning

Shuichi Dejima; Wei Gao; Kei Katakura; Satoshi Kiyono; Yoshiyuki Tomita

doi:10.1016/j.precisioneng.2004.11.005

Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning

Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

This paper discusses dynamic modeling, controller design and experimental validation for development of a three degree of freedom (DOF) planar motion stage for precision positioning in the XY directions. A model of the stage dynamics was first identified for the purpose of controller design using the results of step response tests. A proportional integral derivative (PID) feedback control with disturbance observer was then designed and implemented using an analytical method. We discuss the policy for PID controller tuning to achieve the most desirable performance. In addition, a feed-forward control consisting of a simple predictor was added to reduce tracking error. Experimental results show that the developed controller provides fast positioning with less tracking error than a simple PID controller and is suitable for precise positioning of multi-DOF stage system.

Original language	English
Pages (from-to)	263-271
Number of pages	9
Journal	Precision Engineering
Volume	29
Issue number	3
DOIs	https://doi.org/10.1016/j.precisioneng.2004.11.005
Publication status	Published - 2005 Jul

Keywords

Controller
Planar motion stage
Precision positioning
Surface encoder

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1016/j.precisioneng.2004.11.005

Cite this

@article{41888349d0884a5592a850de9a70c3c8,

title = "Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning",

abstract = "This paper discusses dynamic modeling, controller design and experimental validation for development of a three degree of freedom (DOF) planar motion stage for precision positioning in the XY directions. A model of the stage dynamics was first identified for the purpose of controller design using the results of step response tests. A proportional integral derivative (PID) feedback control with disturbance observer was then designed and implemented using an analytical method. We discuss the policy for PID controller tuning to achieve the most desirable performance. In addition, a feed-forward control consisting of a simple predictor was added to reduce tracking error. Experimental results show that the developed controller provides fast positioning with less tracking error than a simple PID controller and is suitable for precise positioning of multi-DOF stage system.",

keywords = "Controller, Planar motion stage, Precision positioning, Surface encoder",

author = "Shuichi Dejima and Wei Gao and Kei Katakura and Satoshi Kiyono and Yoshiyuki Tomita",

note = "Funding Information: This study was financially supported by a Grant-in-Aid for Scientific Research from The Japan Society for Promotion of Science (JSPS No. 14102017) and a grant from MEXT. The authors thank T. Nakada, H. Yanai and M. Mito for their contributions to the experiments. ",

year = "2005",

month = jul,

doi = "10.1016/j.precisioneng.2004.11.005",

language = "English",

volume = "29",

pages = "263--271",

journal = "Precision Engineering",

issn = "0141-6359",

publisher = "Elsevier Inc.",

number = "3",

}

TY - JOUR

T1 - Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning

AU - Dejima, Shuichi

AU - Gao, Wei

AU - Katakura, Kei

AU - Kiyono, Satoshi

AU - Tomita, Yoshiyuki

N1 - Funding Information: This study was financially supported by a Grant-in-Aid for Scientific Research from The Japan Society for Promotion of Science (JSPS No. 14102017) and a grant from MEXT. The authors thank T. Nakada, H. Yanai and M. Mito for their contributions to the experiments.

PY - 2005/7

Y1 - 2005/7

N2 - This paper discusses dynamic modeling, controller design and experimental validation for development of a three degree of freedom (DOF) planar motion stage for precision positioning in the XY directions. A model of the stage dynamics was first identified for the purpose of controller design using the results of step response tests. A proportional integral derivative (PID) feedback control with disturbance observer was then designed and implemented using an analytical method. We discuss the policy for PID controller tuning to achieve the most desirable performance. In addition, a feed-forward control consisting of a simple predictor was added to reduce tracking error. Experimental results show that the developed controller provides fast positioning with less tracking error than a simple PID controller and is suitable for precise positioning of multi-DOF stage system.

AB - This paper discusses dynamic modeling, controller design and experimental validation for development of a three degree of freedom (DOF) planar motion stage for precision positioning in the XY directions. A model of the stage dynamics was first identified for the purpose of controller design using the results of step response tests. A proportional integral derivative (PID) feedback control with disturbance observer was then designed and implemented using an analytical method. We discuss the policy for PID controller tuning to achieve the most desirable performance. In addition, a feed-forward control consisting of a simple predictor was added to reduce tracking error. Experimental results show that the developed controller provides fast positioning with less tracking error than a simple PID controller and is suitable for precise positioning of multi-DOF stage system.

KW - Controller

KW - Planar motion stage

KW - Precision positioning

KW - Surface encoder

UR - http://www.scopus.com/inward/record.url?scp=19944369395&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=19944369395&partnerID=8YFLogxK

U2 - 10.1016/j.precisioneng.2004.11.005

DO - 10.1016/j.precisioneng.2004.11.005

M3 - Article

AN - SCOPUS:19944369395

VL - 29

SP - 263

EP - 271

JO - Precision Engineering

JF - Precision Engineering

SN - 0141-6359

IS - 3

ER -

Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this