Dual work function phase controlled Ni-FUSI CMOS (NiSi NMOS, Ni 2Si or Ni31Si12 PMOS): Manufacturability, reliability & process window improvement by sacrificial SiGe cap

A. Veloso, T. Hoffmann, A. Lauwers, S. Brus, J. F. De Marneffe, S. Locorotondo, C. Vrancken, T. Kauerauf, A. Shickova, B. Sijmus, H. Tigelaar, M. A. Pawlak, H. Y. Yu, C. Demeurisse, S. Kubicek, C. Kerner, T. Chiarella, O. Richard, H. Bender, Masaaki NiwaP. Absil, M. Jurczak, S. Biesemans, J. A. Kittl

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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Engineering & Materials Science