Dual-servo mechanism of STM for measurement of sub millimeter deep trench structures

Wei Zhang, Chao Jin, Yuan Liu Chen, Bing Feng Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new control method of the Z-direction module of STM (scanning tunnel microscope). The major component of our method is a dual-servo mechanism, which is consist of a PZT (Piezoelectric Transducer) and a motorized micro displacement stage. Traditionally, STM employs PZT as the servo scanner, which provides very high precision but has a small range. The mean idea of our method is compensating the insufficient measuring range of the PZT through a motorized micro displacement stage. Our method succeeds to eliminates the limitation of measuring range of PZT and enlarges the vertical measurement scale of STM from sub-micrometer to sub-millimetre.

Original languageEnglish
Title of host publicationUltra-Precision Machining Technologies
Pages146-150
Number of pages5
DOIs
Publication statusPublished - 2012
Event8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011 - Hangzhou City, China
Duration: 2011 Nov 202011 Nov 22

Publication series

NameAdvanced Materials Research
Volume497
ISSN (Print)1022-6680

Other

Other8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011
Country/TerritoryChina
CityHangzhou City
Period11/11/2011/11/22

Keywords

  • Dual-servo mechanism
  • Large scanning scale
  • STM system
  • Steep-sidewall sub millimeter structure

ASJC Scopus subject areas

  • Engineering(all)

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