DRY ETCH RESISTANCE OF METAL-FREE AND HALOGEN-SUBSTITUTED RESIST MATERIALS.

Hiroshi Gokan, Katsumi Tanigaki, Yoshitake Ohnishi

Research output: Contribution to specialist publication › Article

15 Citations (Scopus)

Fingerprint

Dive into the research topics of 'DRY ETCH RESISTANCE OF METAL-FREE AND HALOGEN-SUBSTITUTED RESIST MATERIALS.'. Together they form a unique fingerprint.

Chemistry

Engineering

Pharmacology, Toxicology and Pharmaceutical Science

Material Science

Physics