Double-mesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity

Kaori Kurihara, Takahiro Numai, Ichiro Ogura, Hideo Kosaka, Mitsunori Sugimoto, Kenichi Kasahara

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


We report a high electronic-optical power conversion efficiency of 11.4% in the laser operation of a doublemesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity. This high conversion efficiency is due to both reduction in the device resistance and increase in light emission efficiency. To reduce electrical resistance, a double mesa structure with a highly doped region is proposed and the resistance reduction is analyzed. To increase light emission efficiency, efficient carrier confinement in the active region by a proton-implanted structure, threshold current reduction by photon recycling, and decreased light absorption by annealing after proton implantation are utilized. Electronic-optical conversion efficiency of over 10% is achieved in surface- emitting devices for the first time to the authors’ knowledge.

Original languageEnglish
Pages (from-to)604-608
Number of pages5
JournalJapanese journal of applied physics
Issue number1 S
Publication statusPublished - 1993 Jan
Externally publishedYes


  • 2-D integration
  • Electronic-optical power conversion efficiency
  • Optical functional device
  • Optical functional interconnection
  • Proton implantation
  • Surface-emitting laser

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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