TY - JOUR
T1 - Double-mesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity
AU - Kurihara, Kaori
AU - Numai, Takahiro
AU - Ogura, Ichiro
AU - Kosaka, Hideo
AU - Sugimoto, Mitsunori
AU - Kasahara, Kenichi
PY - 1993/1
Y1 - 1993/1
N2 - We report a high electronic-optical power conversion efficiency of 11.4% in the laser operation of a doublemesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity. This high conversion efficiency is due to both reduction in the device resistance and increase in light emission efficiency. To reduce electrical resistance, a double mesa structure with a highly doped region is proposed and the resistance reduction is analyzed. To increase light emission efficiency, efficient carrier confinement in the active region by a proton-implanted structure, threshold current reduction by photon recycling, and decreased light absorption by annealing after proton implantation are utilized. Electronic-optical conversion efficiency of over 10% is achieved in surface- emitting devices for the first time to the authors’ knowledge.
AB - We report a high electronic-optical power conversion efficiency of 11.4% in the laser operation of a doublemesa-structure vertical-to-surface transmission electro-photonic device with a vertical cavity. This high conversion efficiency is due to both reduction in the device resistance and increase in light emission efficiency. To reduce electrical resistance, a double mesa structure with a highly doped region is proposed and the resistance reduction is analyzed. To increase light emission efficiency, efficient carrier confinement in the active region by a proton-implanted structure, threshold current reduction by photon recycling, and decreased light absorption by annealing after proton implantation are utilized. Electronic-optical conversion efficiency of over 10% is achieved in surface- emitting devices for the first time to the authors’ knowledge.
KW - 2-D integration
KW - Electronic-optical power conversion efficiency
KW - Optical functional device
KW - Optical functional interconnection
KW - Proton implantation
KW - Surface-emitting laser
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U2 - 10.1143/JJAP.32.604
DO - 10.1143/JJAP.32.604
M3 - Article
AN - SCOPUS:0027307882
VL - 32
SP - 604
EP - 608
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 1 S
ER -