Doppler-shifted laser-induced fluorescence diagnostics of an ultrahigh-frequency discharge plasma

Toshiki Nakano, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

Ultrahigh-frequency (UHF) discharge plasma, as well as electron cyclotron resonance (ECR) plasma and inductively coupled plasma (ICP), is diagnosed in a series of measurements of metastable ion (Ar+, Cl+) and neutral (Ne) temperatures by Doppler-shifted laser-induced fluorescence. Cl+ temperature is found to be lower in UHF plasma and ICP than in ECR plasma. In UHF plasma, the ion temperature weakly depends on both pressure and power, suggesting that plasma uniformity is insensitive to these external parameters. Magnetic multipole confinement enables the production of a stable UHF plasma even at pressures below 0.13Pa where the plasma cannot be produced without the confinement. In this pressure region, Cl+ temperature is decreased to ≈ 0.1 eV.

Original languageEnglish
Pages (from-to)4597-4600
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number7 SUPPL. B
Publication statusPublished - 1997 Jul 1
Externally publishedYes

Keywords

  • Doppler-shifted laser-induced fluorescence
  • Ion temperature
  • Ion velocity distribution function
  • Neutral temperature
  • Ultrahigh-frequency plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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