Dopant Redistribution During Gate Oxidation Including Transient Enhanced Diffusion in Oxidizing Ambient

Tetsuya Uchida, Katsumi Eikyu, Masato Fujinaga, Akinobu Teramoto, Hirokazu Miyoshi

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Dopant Redistribution During Gate Oxidation Including Transient Enhanced Diffusion in Oxidizing Ambient'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy