Distributed electrostatic micro actuator

Motoharu Yamaguchi, Shuji Kawamura, Kazuyuki Minami, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

36 Citations (Scopus)


A new micro actuator driven by electrostatic force is described. We call it a distributed electrostatic actuator, because it consists of many driving units. Each driving unit has wave-like electrodes, which are insulated and pulled each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure and the external force. The motion of the actuator was analyzed with finite element method (FEM) and the macro model of the actuator was fabricated to verify its motion. In this actuator the apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving. It was confirmed that the apparent compliance can be changed by the feedback gain.

Original languageEnglish
Title of host publicationIEEE Micro Electro Mechanical Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)0780309588
Publication statusPublished - 1993 Jan 1
EventProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
Duration: 1993 Feb 71993 Feb 10

Publication series

NameIEEE Micro Electro Mechanical Systems


OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
CityFort Lauderdale, FL, USA

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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