A new micro actuator driven by electrostatic force is described. We call it a distributed electrostatic actuator, because it consists of many driving units. Each driving unit has wave-like electrodes, which are insulated and pulled each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure and the external force. The motion of the actuator was analyzed with finite element method (FEM) and the macro model of the actuator was fabricated to verify its motion. In this actuator the apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving. It was confirmed that the apparent compliance can be changed by the feedback gain.