Displacement sensor based on grating imaging with a cylindrical lens array and a phase grating

Toru Oka, Yoichi Ohmura, Hajime Nakajima, Toshiro Nakashima, Wei Gao, Kazuhiro Hane, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy