Displacement-amplified dynamic varifocal mirror using mechanical resonance

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.

Original languageEnglish
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages161-162
Number of pages2
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: 2013 Aug 182013 Aug 22

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period13/8/1813/8/22

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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