Dispersion-compensation electron-energy-loss spectrometer

Hiroshi Okuyama; Shuji Shimonaka; Yoshimi Yasui; Tsuyoshi Takaoka; Mitsuaki Nishijima; Yukihiro Taguchi

doi:10.1143/jjap.37.6248

Dispersion-compensation electron-energy-loss spectrometer

Hiroshi Okuyama, Shuji Shimonaka, Yoshimi Yasui, Tsuyoshi Takaoka, Mitsuaki Nishijima, Yukihiro Taguchi

Division of Measurements

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1 Citation (Scopus)

Abstract

A dispersion-compensation electron-energy-loss spectrometer which consists of two 90° spherical sectors has been constructed and its characteristics have been tested. We have obtained the detector current of 160 pA with the full-width at half maximum of 25 meV for the primary electron energy of 19.5 eV in the direct mode, where electrons passing through the monochromator are directly detected by the analyzer without reflection from a sample. The obtained characteristics have been discussed, and suggestions for the design of an advanced spectrometer have been given.

Original language	English
Pages (from-to)	6248-6252
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	37
Issue number	11
DOIs	https://doi.org/10.1143/jjap.37.6248
Publication status	Published - 1998 Nov

Keywords

Dispersion compensation
Electron energy loss spectroscopy
Electron spectrometer

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.37.6248

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Dispersion-compensation electron-energy-loss spectrometer. / Okuyama, Hiroshi; Shimonaka, Shuji; Yasui, Yoshimi; Takaoka, Tsuyoshi; Nishijima, Mitsuaki; Taguchi, Yukihiro.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 37, No. 11, 11.1998, p. 6248-6252.

Research output: Contribution to journal › Article › peer-review

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AU - Nishijima, Mitsuaki

AU - Taguchi, Yukihiro

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Dispersion-compensation electron-energy-loss spectrometer

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Keywords

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