Dispersion-compensation electron-energy-loss spectrometer

Hiroshi Okuyama, Shuji Shimonaka, Yoshimi Yasui, Tsuyoshi Takaoka, Mitsuaki Nishijima, Yukihiro Taguchi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A dispersion-compensation electron-energy-loss spectrometer which consists of two 90° spherical sectors has been constructed and its characteristics have been tested. We have obtained the detector current of 160 pA with the full-width at half maximum of 25 meV for the primary electron energy of 19.5 eV in the direct mode, where electrons passing through the monochromator are directly detected by the analyzer without reflection from a sample. The obtained characteristics have been discussed, and suggestions for the design of an advanced spectrometer have been given.

Original languageEnglish
Pages (from-to)6248-6252
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number11
Publication statusPublished - 1998 Nov 1

Keywords

  • Dispersion compensation
  • Electron energy loss spectroscopy
  • Electron spectrometer

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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