The compositional fluctuation of W developed in Cobalt-Tungsten (Co-W) films by a scanning transmission microscope was investigated. The effect of elastic energy on the phase separation behavior in the film was considered with the thermodynamic calculations. The Cromium (Cr) layer was deposited at 423 K by using a desputtering and the Co-W layer was deposited at room temperature and 573 K by an rf sputtering. It was observed that the composition dependence of of the lattice constant of the Co-W system was larger than that of Co-Cr system.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)