Direct observation of hexagonal boron nitride at the grain boundary of cubic boron nitride by high resolution electron microscopy

Wei Lie Zhou, Yuichi Ikuhara, Masao Murakawa, Syuichi Watanabe, Tetsuya Suzuki

    Research output: Contribution to journalArticlepeer-review

    4 Citations (Scopus)

    Abstract

    Cubic boron nitride (c-BN) film deposited on a Si substrate was observed by high resolution electron microscopy. Thin layers, 1-2 nm, of hexagonal boron nitride (h-BN) phase were often found at the boundaries of c-BN grains. The observed interplanar spacing was about 0.33 nm, which coincided with that of the (0002) plane of h-BN. The nucleation mechanism of c-BN film is briefly discussed based on the formation of the h-BN phase at the grain boundaries. The existence of the h-BN phase at the boundaries of c-BN grains may be the reason for the occurrence of compressive stress and cracks in c-BN thin films.

    Original languageEnglish
    Number of pages1
    JournalApplied Physics Letters
    Volume66
    Publication statusPublished - 1995 Dec 1

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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