Direct micropatterning of high dielectric BaTiO 3 films by laser-induced pyrolysis with a nano-crystalline seeding technique

Yoshio Kobayashi, Kenshi Miyajima, Daisuke Nagao, Akira Watanabe, Shinji Yamada, Takao Miwa, Mikio Konno

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A direct patterning method of dielectric BaTiO 3 (BT) films is proposed, which applies laser-induced pyrolysis in combination with nano-crystalline seeding technique. A precursor solution of a BT complex alkoxide containing BT nano-crystalline particles with polyvinylpyrollidone (PVP) as dispersion stabilizer was spin-coated on Pt substrate. An Ar + laser beam was focused and scanned on spin-coated BT films, which induced pyrolysis and crystallization of the films with spatial selectivity. Micropatterns were obtained by striping laser-unirradiated regions on the films with HCl aqueous solution. Raman spectra of the micropattern confirmed that the structures were tetragonal crystalline BT. Clear micropatterns with a line width of ca. 3 μm and an interval of 5 μm were formed at PVP concentrations of 25 and 50 kg/m 3 . The dielectric constant and dissipation factor of the film fabricated at a laser energy density of 27 MW/cm 2 and a scanning speed of 25 μm/s attained 76.2 and 0.07, respectively, for a measurement frequency of 100 kHz.

Original languageEnglish
Pages (from-to)5293-5301
Number of pages9
JournalApplied Surface Science
Volume253
Issue number12
DOIs
Publication statusPublished - 2007 Apr 15

Keywords

  • BaTiO
  • Crystallization
  • Dielectric properties
  • Laser-induced pyrolysis
  • Micropattern
  • Raman spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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