Direct measurement of the resolving power of X-ray CT system in SPring-8

Kentaro Uesugi, Yoshio Suzuki, Hidekazu Takano, Shigeharu Tamura, Nagao Kamijo, Naoto Yagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

Resolving power of high spatial resolution X-ray computed tomography (CT) system was evaluated by taking CT images of artificial test patterns at BL47XU in SPring-8 (SP-μCT BL47XU). The system consists of an in-vacuum type undulator, a double crystal monochromator cooled with liquid nitrogen, a high precision sample stages and a high spatial resolution X-ray detector. For the precise measurement of the resolving power, the artificial test patterns of Cu/Al concentric multilayer were fabricated by DC sputtering deposition at AIST Kansai. 7 or 5 layers of Cu/Al are deposited by period of 2 μm and 1 μm. Therefore the resolving power could be measured at 4 μm and 2 μm with each test pattern. It was confirmed that the system had a resolving power of 2 μm at 15keV from the CT images of test patterns. The resolution is not independent on the used energy. At 30keV, the resolving power was slightly poorer than 2 μm. The result was consistent with the point spread functions of the high resolution detector measured by focused micro-beam.

Original languageEnglish
Title of host publicationSynchrotron Radiation Instrumentation
Subtitle of host publication8th International Conference on Synchrotron Radiation Instrumentation
PublisherAmerican Institute of Physics Inc.
Pages1316-1319
Number of pages4
ISBN (Electronic)0735401799
DOIs
Publication statusPublished - 2004 May 12
Externally publishedYes
Event8th International Conference on Synchrotron Radiation Instrumentation - San Francisco, United States
Duration: 2003 Aug 252003 Aug 29

Publication series

NameAIP Conference Proceedings
Volume705
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other8th International Conference on Synchrotron Radiation Instrumentation
CountryUnited States
CitySan Francisco
Period03/8/2503/8/29

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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