Direct growth of graphene and graphene nanoribbon on an insulating substrate by rapid-heating plasma CVD

Toshiaki Kato, Rikizo Hatakeyama, Toshiro Kaneko

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

A transfer-free method for growing 2D graphene sheets directly on a SiO2 substrate has been realized by rapid-heating plasma chemical vapor deposition (RH-PCVD). Using this method, high-quality single-layer graphene sheets with hexagonal domain can be selectively grown between a Ni film and a SiO2 substrate. Systematic investigations reveal that the relatively thin Ni layer, rapid heating, and plasma CVD are critical to the success of this unique method of graphene growth. By applying this technique, graphene nanoribbon, 1D graphene structure, has also been directly grown on a SiO2 substrate. Precise control of the site and alignment of narrow (~23 nm) graphene nanoribbons can be realized by directly converting a nickel nanobar into a graphene nanoribbon using rapid-heating plasma CVD. The nanoribbons grow directly between the source and drain electrodes of a field-effect transistor without any posttreatment and exhibit a clear transport gap (58.5 meV) and a high on/off ratio (>104). The process is scalable and completely compatible with existing semiconductor processes and is expected to allow the integration of graphene nanoribbons with silicon technology.

Original languageEnglish
Title of host publicationFrontiers of Graphene and Carbon Nanotubes
Subtitle of host publicationDevices and Applications
PublisherSpringer Japan
Pages37-52
Number of pages16
ISBN (Electronic)9784431553724
ISBN (Print)9784431553717
DOIs
Publication statusPublished - 2015 Jan 1

Keywords

  • Direct growth
  • Graphene nanoribbon
  • Integration
  • Plasma CVD

ASJC Scopus subject areas

  • Engineering(all)
  • Biochemistry, Genetics and Molecular Biology(all)
  • Materials Science(all)

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  • Cite this

    Kato, T., Hatakeyama, R., & Kaneko, T. (2015). Direct growth of graphene and graphene nanoribbon on an insulating substrate by rapid-heating plasma CVD. In Frontiers of Graphene and Carbon Nanotubes: Devices and Applications (pp. 37-52). Springer Japan. https://doi.org/10.1007/978-4-431-55372-4_4