TY - JOUR
T1 - Direct fabrication of uniform and high density Sub-10-nm etching mask using ferritin molecules on Si and GaAs surface for actual quantum-dot superlattice
AU - Igarashi, Makoto
AU - Tsukamoto, Rikako
AU - Huang, Chi Hsien
AU - Yamashita, Ichiro
AU - Samukawa, Seiji
PY - 2011/1/1
Y1 - 2011/1/1
N2 - Direct formation of a uniform, closely packed, and high-density two-dimensional array of ferritin molecules was successfully achieved on Si and GaAs substrates by modifying the surface using neutral beam oxidation, whereas the same protocol produced a low density and disorded array on thermal silicon oxide. The surfaces of neutral-beam-oxidized SiO2 and GaAs and thermal silicon oxide were characterized, and the mechanism of ferritin array formation was investigated. The experimental results strongly suggested that the surface hydrophilicity realized by the neutral beam oxidation is essential for the formation of an ordered and high-density two-dimensional array of ferritin molecules.
AB - Direct formation of a uniform, closely packed, and high-density two-dimensional array of ferritin molecules was successfully achieved on Si and GaAs substrates by modifying the surface using neutral beam oxidation, whereas the same protocol produced a low density and disorded array on thermal silicon oxide. The surfaces of neutral-beam-oxidized SiO2 and GaAs and thermal silicon oxide were characterized, and the mechanism of ferritin array formation was investigated. The experimental results strongly suggested that the surface hydrophilicity realized by the neutral beam oxidation is essential for the formation of an ordered and high-density two-dimensional array of ferritin molecules.
UR - http://www.scopus.com/inward/record.url?scp=79251585254&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79251585254&partnerID=8YFLogxK
U2 - 10.1143/APEX.4.015202
DO - 10.1143/APEX.4.015202
M3 - Article
AN - SCOPUS:79251585254
VL - 4
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 1
M1 - 015202
ER -