Direct fabrication of uniform and high density Sub-10-nm etching mask using ferritin molecules on Si and GaAs surface for actual quantum-dot superlattice

Makoto Igarashi, Rikako Tsukamoto, Chi Hsien Huang, Ichiro Yamashita, Seiji Samukawa

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Abstract

Direct formation of a uniform, closely packed, and high-density two-dimensional array of ferritin molecules was successfully achieved on Si and GaAs substrates by modifying the surface using neutral beam oxidation, whereas the same protocol produced a low density and disorded array on thermal silicon oxide. The surfaces of neutral-beam-oxidized SiO2 and GaAs and thermal silicon oxide were characterized, and the mechanism of ferritin array formation was investigated. The experimental results strongly suggested that the surface hydrophilicity realized by the neutral beam oxidation is essential for the formation of an ordered and high-density two-dimensional array of ferritin molecules.

Original languageEnglish
Article number015202
JournalApplied Physics Express
Volume4
Issue number1
DOIs
Publication statusPublished - 2011 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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