脂質二分子膜センサのための埋植チップ上SU-8 マイクロチャネル直接形成法の開発

Translated title of the contribution: Direct fabrication of SU-8 microchannel across an embedded chip for potentiometric bilayer lipid membrane sensor

Hiromichi Wakebe, Takafumi Fukushima, Tetsu Tanaka

Research output: Contribution to journalArticlepeer-review

Abstract

Membrane proteins play a critically important role, especially in molecular recognition and cellular transport processes, which makes them the most prevalent drug targets and also to be a good sensing element for biosensing applications. However, the skill-dependent and manual fashion to form bilayer lipid membranes (BLMs) has limited their use for application purposes. Here, we introduce a fabrication technique of SU-8 microchannel suitable for microfluidic-based BLM formation and show a preliminary step of our ISFET-based BLM sensor. Making notches on the corners of a rectangular through-wafer hole etched in a silicon carrier substrate reduced the gap width between an embedded chip and the carrier as close as possible, leading to the gap depth of ~4 µm. SU-8 microchannel on the chip-carrier assembly was directly fabricated by UV exposure through a bonded quartz lid and developing SU-8 through the fluidic ports drilled in the lid, without needing a sealing process typically causes an alignment mismatch or void formation. Finally, the capability to form BLMs was tested and proven by the successfully encapsulated fluorescent dye in microwells fabricated on the embedded chip. This paper is the first report of the successful formation of BLMs on a chip-in-carrier assembly by the microfluidic method.

Translated title of the contributionDirect fabrication of SU-8 microchannel across an embedded chip for potentiometric bilayer lipid membrane sensor
Original languageJapanese
Pages (from-to)327-335
Number of pages9
JournalIEEJ Transactions on Sensors and Micromachines
Volume141
Issue number10
DOIs
Publication statusPublished - 2021

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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