Nano-scale concentration fluctuations in sputtered Co-23 at% Cr magnetic thin films were analyzed by atom probe field ion microscopy (APFIM). The atom probe concentration depth profile obtained from the film which was deposited on the W tip at 200°C clearly showed that the composition fluctuated significantly. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr. This result proves that compositional fluctuations are present inside the grains of the Co-Cr sputtered film as suggested by the TEM observation of the chrysanthemum-like pattern (CP) structure.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics