Direct evidence for compositional fluctuation in sputtered Co-Cr thin films

K. Hono, Y. Maeda, J. L. Li, T. Sakurai

Research output: Contribution to journalLetterpeer-review

23 Citations (Scopus)


Nano-scale concentration fluctuations in sputtered Co-23 at% Cr magnetic thin films were analyzed by atom probe field ion microscopy (APFIM). The atom probe concentration depth profile obtained from the film which was deposited on the W tip at 200°C clearly showed that the composition fluctuated significantly. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr. This result proves that compositional fluctuations are present inside the grains of the Co-Cr sputtered film as suggested by the TEM observation of the chrysanthemum-like pattern (CP) structure.

Original languageEnglish
Pages (from-to)L254-L258
JournalJournal of Magnetism and Magnetic Materials
Issue number3
Publication statusPublished - 1992 May
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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