Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Akira Watanabe; Yoshio Kobayashi; Mikio Konno; Shinji Yamada; Takao Miwa

doi:10.1143/JJAP.44.L740

Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Akira Watanabe, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to journal › Article › peer-review

35 Citations (Scopus)

Abstract

Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10^-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).

Original language	English
Pages (from-to)	L740-L742
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	20-23
DOIs	https://doi.org/10.1143/JJAP.44.L740
Publication status	Published - 2005 Sep 5

Keywords

Ag microwiring
Laser direct drawing
Laser-induced pyrolysis
Liquid-dispersed metal nanoparticle
Nanometalink

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L740

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title = "Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles",

abstract = "Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).",

keywords = "Ag microwiring, Laser direct drawing, Laser-induced pyrolysis, Liquid-dispersed metal nanoparticle, Nanometalink",

author = "Akira Watanabe and Yoshio Kobayashi and Mikio Konno and Shinji Yamada and Takao Miwa",

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doi = "10.1143/JJAP.44.L740",

language = "English",

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T1 - Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

AU - Watanabe, Akira

AU - Kobayashi, Yoshio

AU - Konno, Mikio

AU - Yamada, Shinji

AU - Miwa, Takao

PY - 2005/9/5

Y1 - 2005/9/5

N2 - Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).

AB - Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).

KW - Ag microwiring

KW - Laser direct drawing

KW - Laser-induced pyrolysis

KW - Liquid-dispersed metal nanoparticle

KW - Nanometalink

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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ER -

Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Abstract

Keywords

ASJC Scopus subject areas

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