Abstract
Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).
| Original language | English |
|---|---|
| Pages (from-to) | L740-L742 |
| Journal | Japanese Journal of Applied Physics, Part 2: Letters |
| Volume | 44 |
| Issue number | 20-23 |
| DOIs | |
| Publication status | Published - 2005 Sep 5 |
Keywords
- Ag microwiring
- Laser direct drawing
- Laser-induced pyrolysis
- Liquid-dispersed metal nanoparticle
- Nanometalink
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)
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Cite this
Watanabe, A., Kobayashi, Y., Konno, M., Yamada, S., & Miwa, T. (2005). Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles. Japanese Journal of Applied Physics, Part 2: Letters, 44(20-23), L740-L742. https://doi.org/10.1143/JJAP.44.L740