Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Akira Watanabe, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).

Original languageEnglish
Pages (from-to)L740-L742
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume44
Issue number20-23
DOIs
Publication statusPublished - 2005 Sep 5

Keywords

  • Ag microwiring
  • Laser direct drawing
  • Laser-induced pyrolysis
  • Liquid-dispersed metal nanoparticle
  • Nanometalink

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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