Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles

Akira Watanabe; Kenji Miyajima; Yoshio Kobayashi; Mikio Konno; Shinji Yamada; Takao Miwa

Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles

Akira Watanabe, Kenji Miyajima, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to conference › Paper › peer-review

Abstract

Ag micro-wiring with submicron resolution was fabricated by the laser-induced pyrolysis of the film prepared from liquid-dispersed Ag nanoparticles. Linewidth of the wiring in this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring film by this technique (1.9 × 10 ^-6 Ω cm) is comparable with that of bulk Ag (1.6 × 10 ^-6 Ω cm).

Original language	English
Number of pages	1
Publication status	Published - 2005 Dec 1
Event	54th SPSJ Annual Meeting 2005 - Yokohama, Japan Duration: 2005 May 25 → 2005 May 27

Other

Other	54th SPSJ Annual Meeting 2005
Country/Territory	Japan
City	Yokohama
Period	05/5/25 → 05/5/27

Keywords

Ag micro-wiring
Laser direct drawing
Laser-induced pyrolysis
Liquid-dispersed nanometal particle
Nanometalink

ASJC Scopus subject areas

Engineering(all)

Cite this

@conference{51ab743a2e484b2d9f35172e0dbac240,

title = "Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles",

abstract = "Ag micro-wiring with submicron resolution was fabricated by the laser-induced pyrolysis of the film prepared from liquid-dispersed Ag nanoparticles. Linewidth of the wiring in this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring film by this technique (1.9 × 10 -6 Ω cm) is comparable with that of bulk Ag (1.6 × 10 -6 Ω cm).",

keywords = "Ag micro-wiring, Laser direct drawing, Laser-induced pyrolysis, Liquid-dispersed nanometal particle, Nanometalink",

author = "Akira Watanabe and Kenji Miyajima and Yoshio Kobayashi and Mikio Konno and Shinji Yamada and Takao Miwa",

year = "2005",

month = dec,

day = "1",

language = "English",

note = "54th SPSJ Annual Meeting 2005 ; Conference date: 25-05-2005 Through 27-05-2005",

}

TY - CONF

T1 - Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles

AU - Watanabe, Akira

AU - Miyajima, Kenji

AU - Kobayashi, Yoshio

AU - Konno, Mikio

AU - Yamada, Shinji

AU - Miwa, Takao

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Ag micro-wiring with submicron resolution was fabricated by the laser-induced pyrolysis of the film prepared from liquid-dispersed Ag nanoparticles. Linewidth of the wiring in this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring film by this technique (1.9 × 10 -6 Ω cm) is comparable with that of bulk Ag (1.6 × 10 -6 Ω cm).

AB - Ag micro-wiring with submicron resolution was fabricated by the laser-induced pyrolysis of the film prepared from liquid-dispersed Ag nanoparticles. Linewidth of the wiring in this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring film by this technique (1.9 × 10 -6 Ω cm) is comparable with that of bulk Ag (1.6 × 10 -6 Ω cm).

KW - Ag micro-wiring

KW - Laser direct drawing

KW - Laser-induced pyrolysis

KW - Liquid-dispersed nanometal particle

KW - Nanometalink

UR - http://www.scopus.com/inward/record.url?scp=33645647344&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645647344&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:33645647344

T2 - 54th SPSJ Annual Meeting 2005

Y2 - 25 May 2005 through 27 May 2005

ER -

Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles

Abstract

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Keywords

ASJC Scopus subject areas

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