Direct drawing of Ag micro-wiring by laser-induced pyrolysis of the film prepared from liquid-dispersed nanometal particles

Akira Watanabe, Kenji Miyajima, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

Research output: Contribution to conferencePaperpeer-review

Abstract

Ag micro-wiring with submicron resolution was fabricated by the laser-induced pyrolysis of the film prepared from liquid-dispersed Ag nanoparticles. Linewidth of the wiring in this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring film by this technique (1.9 × 10 -6 Ω cm) is comparable with that of bulk Ag (1.6 × 10 -6 Ω cm).

Original languageEnglish
Number of pages1
Publication statusPublished - 2005 Dec 1
Event54th SPSJ Annual Meeting 2005 - Yokohama, Japan
Duration: 2005 May 252005 May 27

Other

Other54th SPSJ Annual Meeting 2005
CountryJapan
CityYokohama
Period05/5/2505/5/27

Keywords

  • Ag micro-wiring
  • Laser direct drawing
  • Laser-induced pyrolysis
  • Liquid-dispersed nanometal particle
  • Nanometalink

ASJC Scopus subject areas

  • Engineering(all)

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