Dimer structure of clean Si(001) surface studied by grazing-incidence back-scattering MEED

T. Abukawa, T. Shimatani, M. Kimura, Y. Takakuwa, N. Muramatsu, T. Hanano, T. Goto, W. R.A. Huff, S. Kono

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The buckled-dimer structure of the Si(001)2 × 1 surface has been studied as a performance test of an apparatus that was designed and constructed for grazing-incidence back-scattering medium energy electron diffraction (GBMEED). The apparatus mainly consists of a μ-electron-beam gun and an electron energy analyzer of retarding-field and two-dimensional-display type. A μ-electron-beam of 1 keV was incident at a grazing angle to a single-domain Si(001)2 × 1 surface and quasi-elastically back-scattered electron intensity patterns (GBMEED patterns) were displayed by the two-dimensional analyzer. It was shown that the buckled dimer structure of the Si(001)2 × 1 surface was directly reflected in the GBMEED patterns. This demonstrates the potential of the method and the capabilities of the GBMEED apparatus we have constructed as a promising surface-structure-analysis tool.

Original languageEnglish
Pages (from-to)533-538
Number of pages6
JournalJournal of Electron Spectroscopy and Related Phenomena
Publication statusPublished - 1998 Mar


  • Electron diffraction
  • MEED
  • Si dimers
  • Si(001) surface
  • Surface structure analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry


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