Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

S. Ito, I. Kodama, W. Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A nanopipette ball probe has been introduced for the dimensional measurement of the micrometer-scale structures. A hollow glass nanopipette, which is fabricated by thermal pulling process, is used as the shaft of the probe for the detection of the contact. Since the stiffness of the glass nanopipette is lower than that of metal shaft which is similar size of the glass nanopipette, the contact force between the probe and the sample will be able to reduce in comparison with the probe of the metal shaft. The edge of the nanopipette is filled with the thermosetting resin, and a micro glass sphere with 9 mm diameter is fixed on the edge of the nanopipette probe by the thermosetting resin. By attaching the micro sphere at the edge of the nanopipette, the edge of the probe will be possible to maintain a uniform shape in all directions. With regard to the detection of the contact, the method of the shear-force detection has been employed because of its high-sensitivity and nanometer-scale resolution. The resolution and the sensitivity of the nanopipette probe are evaluated, and then surface profile measurement of the microstructure is demonstrated.

Original languageEnglish
Title of host publicationSixth International Symposium on Precision Mechanical Measurements
DOIs
Publication statusPublished - 2013 Dec 16
Event6th International Symposium on Precision Mechanical Measurements - Guiyang, China
Duration: 2013 Aug 82013 Aug 12

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8916
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other6th International Symposium on Precision Mechanical Measurements
CountryChina
CityGuiyang
Period13/8/813/8/12

Keywords

  • Dimensional measurement
  • Frequency modulation detection
  • Nanometrology
  • Nanopipette ball probe
  • Shear-force detection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection'. Together they form a unique fingerprint.

Cite this