Digital Etching of InP by Intermittent Injection of Trisdimethylaminophosphorus in Ultrahigh Vacuum

Nobuyuki Otsuka, Jun Ichi Nishizawa, Yutaka Oyama, Hideyuki Kikuchi, Ken Suto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds