Digital compensated capacitive pressure sensor using CMOS technology for low pressure measurements

Tomio Nagata, Hiroaki Terabe, Sirou Kuwahara, Sizuki Sakurai, Osamu Tabata, Susumu Sugiyama, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

A capacitive pressure sensor with digital output for low-pressure measurements has been fabricated using CMOS technology. The sensor output has been compensated and adjusted by a newly developed method. The sensor has the hybrid configuration of a sensor chip and a digital IC chip. The sensor chip consists of a sensor capacitor, a reference capacitor, and two capacitance-to-frequency converter circuits. The digital IC chip consists of a clock generator, a timing circuit, and a 12-b up/down counter. The thermal sensitivity shift and the thermal zero shift of the output were compensated at the sensor chip. The offset and full scale span of the output were compensated at the sensor chip. By using the novel compensation and adjustment technique, a thermal sensitivity shift of 0.026%F.S./°C and a thermal zero shift of 0.013%F.S./°C for a pressure range of 0-200 mmH2O and a temperature range of 25-75°C were obtained.

Original languageEnglish
Title of host publicationTransducers '91
PublisherPubl by IEEE
Pages308-311
Number of pages4
ISBN (Print)0879425857
Publication statusPublished - 1991 Dec 1
Event1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
Duration: 1991 Jun 241991 Jun 28

Publication series

NameTransducers '91

Other

Other1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period91/6/2491/6/28

ASJC Scopus subject areas

  • Engineering(all)

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