Abstract
A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have been performed. A Fresnel zone plate fabricated by the electron-beam lithography technique is used as an X-ray focusing device. The material of the zone structure is tantalum with thickness of about 1 μm, and the outermost zone width of the zone plate is 0.25 μm. A focused spot size measured by knife-edge scanning is 0.3 μm at an X-ray energy of 8 keV. Closer evaluation of the spatial resolution has been done by observing resolution test patterns in a scanning X-ray microscopy experiment, and fine patterns with a 0.2 μ-structure have been resolved.
| Original language | English |
|---|---|
| Pages (from-to) | 1508-1510 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 40 |
| Issue number | 3 A |
| DOIs | |
| Publication status | Published - 2001 Mar |
| Externally published | Yes |
Keywords
- Fresnel zone plate
- Microbeam
- Scanning microscopy
- Synchrotron radiation
- X-ray microscopy
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
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Cite this
Suzuki, Y., Takeuchi, A., Takano, H., Ohigashi, T., & Takenaka, H. (2001). Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 40(3 A), 1508-1510. https://doi.org/10.1143/jjap.40.1508