Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Yoshio Suzuki; Akihisa Takeuchi; Hidekazu Takano; Takuji Ohigashi; Hisataka Takenaka

doi:10.1143/jjap.40.1508

Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Takuji Ohigashi, Hisataka Takenaka

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have been performed. A Fresnel zone plate fabricated by the electron-beam lithography technique is used as an X-ray focusing device. The material of the zone structure is tantalum with thickness of about 1 μm, and the outermost zone width of the zone plate is 0.25 μm. A focused spot size measured by knife-edge scanning is 0.3 μm at an X-ray energy of 8 keV. Closer evaluation of the spatial resolution has been done by observing resolution test patterns in a scanning X-ray microscopy experiment, and fine patterns with a 0.2 μ-structure have been resolved.

Original language	English
Pages (from-to)	1508-1510
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	40
Issue number	3 A
DOIs	https://doi.org/10.1143/jjap.40.1508
Publication status	Published - 2001 Mar
Externally published	Yes

Keywords

Fresnel zone plate
Microbeam
Scanning microscopy
Synchrotron radiation
X-ray microscopy

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.40.1508

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Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions. / Suzuki, Yoshio; Takeuchi, Akihisa; Takano, Hidekazu; Ohigashi, Takuji; Takenaka, Hisataka.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 3 A, 03.2001, p. 1508-1510.

Research output: Contribution to journal › Article › peer-review

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Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Abstract

Keywords

ASJC Scopus subject areas

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