Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Takuji Ohigashi, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have been performed. A Fresnel zone plate fabricated by the electron-beam lithography technique is used as an X-ray focusing device. The material of the zone structure is tantalum with thickness of about 1 μm, and the outermost zone width of the zone plate is 0.25 μm. A focused spot size measured by knife-edge scanning is 0.3 μm at an X-ray energy of 8 keV. Closer evaluation of the spatial resolution has been done by observing resolution test patterns in a scanning X-ray microscopy experiment, and fine patterns with a 0.2 μ-structure have been resolved.

Original languageEnglish
Pages (from-to)1508-1510
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number3 A
Publication statusPublished - 2001 Mar
Externally publishedYes


  • Fresnel zone plate
  • Microbeam
  • Scanning microscopy
  • Synchrotron radiation
  • X-ray microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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