Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Takuji Ohigashi, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


X-ray microbeam using Fresnel zone plate as a beam focusing device has been tested at an undulator beamline of SPring-8. The zone material is tantalum with thickness of 1 μm, and the zone structure is fabricated by using electron beam lithography technique. The outermost zone width of the zone plate is 0.25 μm. By utilizing a fully coherent illumination, a focused spot size near to the diffraction-limit (0.3 μm) has been achieved at an X-ray energy of 8 keV. The measured beam profiles shows good agreement with the theoretical profile. The measured diffraction efficiency agrees well with theoretical value within an X-ray energy region from 6 keV to 10 keV. A scanning microscopy experiment has also been performed in order to evaluate the spatial resolution. Fine structures of up to 0.2 μm are clearly observed in the measured image. The modulation transfer function derived from the measured image is 10% at 0.2 μm line and 0.2 μm space.

Original languageEnglish
Pages (from-to)74-84
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001 Jan 1
Externally publishedYes


  • Fresnel zone plate
  • Undulator
  • X-ray microbeam
  • X-ray microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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