Different Etching Mechanisms of Diamond by Oxygen and Hydrogen Plasma: A Reactive Molecular Dynamics Study

Jingxiang Xu, Kang Lu, Ding Fan, Yang Wang, Shaolin Xu, Momoji Kubo

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Different Etching Mechanisms of Diamond by Oxygen and Hydrogen Plasma: A Reactive Molecular Dynamics Study'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds