Dielectric properties of lead zirconate titanate thin films seeded with barium strontium titanate nanoparticles

Tomokazu Tanase, Yoshio Kobayashi, Toshihide Nabatame, Takao Miwa, Mikio Konno

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

A low temperature synthetic method recently proposed by the authors was applied to the fabrication of lead zirconate titanate (PZT) thin films containing crystalline seeds of barium strontium titanate (BST) nanoparticles. PZT precursor and the BST particles were prepared with complex alkoxide methods. Precursor solution suspending the BST particles was spin-coated on Pt/Ti/SiO2/Si substrate to film thickness of 500-800 nm at particle concentrations of 0-25.1 mol%, and annealed at various temperatures. Seeding of BST particles prevented the formation of pyrochlore phases, which appeared at temperatures above 400°C in unseeded PZT films, and induced crystallization of PZT into perovskite structures at 420°C, which was more than 100°C below the crystallization temperature of the unseeded PZT films. Measurement of dielectric properties at 1 kHz showed that the 25.1 mol% BST-seeded PZT films annealed at 450°C had a dielectric constant as high as 300 with a dissipation factor of 0.05. Leakage current density of the film was less than 1 × 10-6 A/cm2 at applied electric field from 0 to 64 kV/cm.

Original languageEnglish
Pages (from-to)71-75
Number of pages5
JournalThin Solid Films
Volume471
Issue number1-2
DOIs
Publication statusPublished - 2005 Jan 3

Keywords

  • Crystalline seeds
  • Crystallization temperature
  • Dielectric properties
  • Lead zirconate titanate

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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