Dielectric properties of anodic oxide film on Nb solid solution/Nb 2N two phase alloys

Satoshi Semboshi; Naofumi Ohtsu; Yoshiteru Mizukoshi; Naoya Masahashi

doi:10.1016/j.tsf.2010.08.131

Dielectric properties of anodic oxide film on Nb solid solution/Nb ₂N two phase alloys

Satoshi Semboshi, Naofumi Ohtsu, Yoshiteru Mizukoshi, Naoya Masahashi

Cooperative Research and Development Center for Advanced Materials

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The structure and dielectric properties of an anodic oxide on Nb solid solution (Nb_ss)/Nb₂N two phase alloys were investigated. The anodized specimens were covered with two types of anodic oxides on the Nb_ss and Nb₂N phases, respectively. The relative permittivity and leakage current density of the anodized specimens can be explained by the combination of the two oxides; the relative permittivity of the specimens increased with the volume fraction of the oxide on the Nb _ss phase, because the relative permittivity of the oxide on the Nb_ss phase is higher than that on the Nb₂N phase. The leakage current was suppressed irrespective of the constitute phases as compared with the anodized pure Nb, because it was reduced in both the oxides on the Nb_ss and Nb₂N phases.

Original language	English
Pages (from-to)	719-724
Number of pages	6
Journal	Thin Solid Films
Volume	519
Issue number	2
DOIs	https://doi.org/10.1016/j.tsf.2010.08.131
Publication status	Published - 2010 Nov 1

Keywords

Anodic oxidation
Leakage current
Niobium
Nitrogen
Permittivity
Structure

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2010.08.131

Cite this

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title = "Dielectric properties of anodic oxide film on Nb solid solution/Nb 2N two phase alloys",

abstract = "The structure and dielectric properties of an anodic oxide on Nb solid solution (Nbss)/Nb2N two phase alloys were investigated. The anodized specimens were covered with two types of anodic oxides on the Nbss and Nb2N phases, respectively. The relative permittivity and leakage current density of the anodized specimens can be explained by the combination of the two oxides; the relative permittivity of the specimens increased with the volume fraction of the oxide on the Nb ss phase, because the relative permittivity of the oxide on the Nbss phase is higher than that on the Nb2N phase. The leakage current was suppressed irrespective of the constitute phases as compared with the anodized pure Nb, because it was reduced in both the oxides on the Nbss and Nb2N phases.",

keywords = "Anodic oxidation, Leakage current, Niobium, Nitrogen, Permittivity, Structure",

author = "Satoshi Semboshi and Naofumi Ohtsu and Yoshiteru Mizukoshi and Naoya Masahashi",

note = "Funding Information: The authors are grateful to Professor Y. Naito of the Osaka Prefecture University for the provisions of the capacitance measurements. The authors thank Professor T.J. Konno of the Institute for Materials Research, Tohoku University for useful discussions and comments. This work was partly supported by the Center for Integrated Nanotechnology Support at Tohoku University and also by the “Nanotechnology Network Project” of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT) of the Japanese Government. Financial support was provided by a Grant-in-Aid for Young Scientists (B) ( 17760583 ) from the Ministry of Education, Science and Culture, Japan, by the Hosokawa Powder Technology Foundation and by the Kinki Invitation Center Foundation.",

year = "2010",

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doi = "10.1016/j.tsf.2010.08.131",

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T1 - Dielectric properties of anodic oxide film on Nb solid solution/Nb 2N two phase alloys

AU - Semboshi, Satoshi

AU - Ohtsu, Naofumi

AU - Mizukoshi, Yoshiteru

AU - Masahashi, Naoya

N1 - Funding Information: The authors are grateful to Professor Y. Naito of the Osaka Prefecture University for the provisions of the capacitance measurements. The authors thank Professor T.J. Konno of the Institute for Materials Research, Tohoku University for useful discussions and comments. This work was partly supported by the Center for Integrated Nanotechnology Support at Tohoku University and also by the “Nanotechnology Network Project” of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT) of the Japanese Government. Financial support was provided by a Grant-in-Aid for Young Scientists (B) ( 17760583 ) from the Ministry of Education, Science and Culture, Japan, by the Hosokawa Powder Technology Foundation and by the Kinki Invitation Center Foundation.

PY - 2010/11/1

Y1 - 2010/11/1

N2 - The structure and dielectric properties of an anodic oxide on Nb solid solution (Nbss)/Nb2N two phase alloys were investigated. The anodized specimens were covered with two types of anodic oxides on the Nbss and Nb2N phases, respectively. The relative permittivity and leakage current density of the anodized specimens can be explained by the combination of the two oxides; the relative permittivity of the specimens increased with the volume fraction of the oxide on the Nb ss phase, because the relative permittivity of the oxide on the Nbss phase is higher than that on the Nb2N phase. The leakage current was suppressed irrespective of the constitute phases as compared with the anodized pure Nb, because it was reduced in both the oxides on the Nbss and Nb2N phases.

AB - The structure and dielectric properties of an anodic oxide on Nb solid solution (Nbss)/Nb2N two phase alloys were investigated. The anodized specimens were covered with two types of anodic oxides on the Nbss and Nb2N phases, respectively. The relative permittivity and leakage current density of the anodized specimens can be explained by the combination of the two oxides; the relative permittivity of the specimens increased with the volume fraction of the oxide on the Nb ss phase, because the relative permittivity of the oxide on the Nbss phase is higher than that on the Nb2N phase. The leakage current was suppressed irrespective of the constitute phases as compared with the anodized pure Nb, because it was reduced in both the oxides on the Nbss and Nb2N phases.

KW - Anodic oxidation

KW - Leakage current

KW - Niobium

KW - Nitrogen

KW - Permittivity

KW - Structure

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