Diamond nucleation in low electron temperature CH4/H2 plasma

Satoru Iizuka, Gouki Nishimura, Reijiro Ikada, Hideyuki Yamaguchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.

Original languageEnglish
Pages (from-to)279-282
Number of pages4
JournalDiamond and Related Materials
Volume14
Issue number3-7
DOIs
Publication statusPublished - 2005 Mar 1

Keywords

  • Diamond crystal
  • Low electron temperature plasma
  • Nano-diamond
  • Nucleation of diamond

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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