Abstract
Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.
| Original language | English |
|---|---|
| Pages (from-to) | 279-282 |
| Number of pages | 4 |
| Journal | Diamond and Related Materials |
| Volume | 14 |
| Issue number | 3-7 |
| DOIs | |
| Publication status | Published - 2005 Mar 1 |
Keywords
- Diamond crystal
- Low electron temperature plasma
- Nano-diamond
- Nucleation of diamond
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Chemistry(all)
- Mechanical Engineering
- Materials Chemistry
- Electrical and Electronic Engineering
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Cite this
Iizuka, S., Nishimura, G., Ikada, R., & Yamaguchi, H. (2005). Diamond nucleation in low electron temperature CH4/H2 plasma. Diamond and Related Materials, 14(3-7), 279-282. https://doi.org/10.1016/j.diamond.2005.01.040