Diamond nucleation in low electron temperature CH4/H2 plasma

Satoru Iizuka; Gouki Nishimura; Reijiro Ikada; Hideyuki Yamaguchi

doi:10.1016/j.diamond.2005.01.040

Diamond nucleation in low electron temperature CH₄/H₂ plasma

Satoru Iizuka, Gouki Nishimura, Reijiro Ikada, Hideyuki Yamaguchi

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature T_e in the plasma is quite important for the nucleation. When T_e is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.

Original language	English
Pages (from-to)	279-282
Number of pages	4
Journal	Diamond and Related Materials
Volume	14
Issue number	3-7
DOIs	https://doi.org/10.1016/j.diamond.2005.01.040
Publication status	Published - 2005 Mar

Keywords

Diamond crystal
Low electron temperature plasma
Nano-diamond
Nucleation of diamond

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

Access to Document

10.1016/j.diamond.2005.01.040

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Cite this

@article{547adb075da849d7adaefd53dae175ab,

title = "Diamond nucleation in low electron temperature CH4/H2 plasma",

abstract = "Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.",

keywords = "Diamond crystal, Low electron temperature plasma, Nano-diamond, Nucleation of diamond",

author = "Satoru Iizuka and Gouki Nishimura and Reijiro Ikada and Hideyuki Yamaguchi",

note = "Funding Information: The authors are indebted to Dr. T. Abe for the film analysis. The work was partially supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology, Japan.",

year = "2005",

month = mar,

doi = "10.1016/j.diamond.2005.01.040",

language = "English",

volume = "14",

pages = "279--282",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

number = "3-7",

}

TY - JOUR

T1 - Diamond nucleation in low electron temperature CH4/H2 plasma

AU - Iizuka, Satoru

AU - Nishimura, Gouki

AU - Ikada, Reijiro

AU - Yamaguchi, Hideyuki

N1 - Funding Information: The authors are indebted to Dr. T. Abe for the film analysis. The work was partially supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology, Japan.

PY - 2005/3

Y1 - 2005/3

N2 - Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.

AB - Nucleation of diamond crystal is observed on a surface of fine diamond particles of micron meters attached to a nickel plate placed in methane-hydrogen plasma. The electron temperature Te in the plasma is quite important for the nucleation. When Te is reduced to ∼0.4 eV, we observed an appearance of nanometer diamond nucleation on the surface of the fine diamond particles. The size and the number of nucleation cite increase with the deposition time with average growth rate of ∼10 nm/h.

KW - Diamond crystal

KW - Low electron temperature plasma

KW - Nano-diamond

KW - Nucleation of diamond

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DO - 10.1016/j.diamond.2005.01.040

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