Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H2 as the only feeding gas

Hongwu Liu, Chengxin Wang, Chunxiao Gao, Yonghao Han, Jifeng Luo, Guangtian Zou, Chao Wen

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Diamond films have been grown on polished Si substrates seeded with nanocrystalline diamond powder colloid using hot-filament chemical vapour deposition. Instead of using the conventional gaseous carbon source, a carbonized W filament was used as the carbon source. The only feeding gas was hydrogen. Compared with those produced by traditional methods, the polycrystalline diamond grown by this new method has smaller grain size. The growth mechanism is also discussed.

Original languageEnglish
Pages (from-to)10969-10972
Number of pages4
JournalJournal of Physics Condensed Matter
Volume14
Issue number44 SPEC ISS.
DOIs
Publication statusPublished - 2002 Nov 11

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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