Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39

Tsuyoshi Hamano, Toshio Hirao, Isamu Nashiyama, Takuro Sakai, Tomihiro Kamiya, Keizo Ishii, Masahiro Takebe

Research output: Contribution to journalArticle

Abstract

The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.

Original languageEnglish
Pages (from-to)461-467
Number of pages7
JournalRadiation Physics and Chemistry
Volume53
Issue number5
DOIs
Publication statusPublished - 1998 Nov 1

ASJC Scopus subject areas

  • Radiation

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