Abstract
The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.
Original language | English |
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Pages (from-to) | 461-467 |
Number of pages | 7 |
Journal | Radiation Physics and Chemistry |
Volume | 53 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1998 Nov 1 |
ASJC Scopus subject areas
- Radiation