Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39

Tsuyoshi Hamano; Toshio Hirao; Isamu Nashiyama; Takuro Sakai; Tomihiro Kamiya; Keizo Ishii; Masahiro Takebe

doi:10.1016/S0969-806X(98)00133-9

Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39

Tsuyoshi Hamano, Toshio Hirao, Isamu Nashiyama, Takuro Sakai, Tomihiro Kamiya, Keizo Ishii, Masahiro Takebe

ENG - Quantum Science and Energy Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.

Original language	English
Pages (from-to)	461-467
Number of pages	7
Journal	Radiation Physics and Chemistry
Volume	53
Issue number	5
DOIs	https://doi.org/10.1016/S0969-806X(98)00133-9
Publication status	Published - 1998 Nov 1

ASJC Scopus subject areas

Radiation

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10.1016/S0969-806X(98)00133-9

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Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39. / Hamano, Tsuyoshi; Hirao, Toshio; Nashiyama, Isamu; Sakai, Takuro; Kamiya, Tomihiro; Ishii, Keizo; Takebe, Masahiro.

In: Radiation Physics and Chemistry, Vol. 53, No. 5, 01.11.1998, p. 461-467.

Research output: Contribution to journal › Article › peer-review

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AU - Sakai, Takuro

AU - Kamiya, Tomihiro

AU - Ishii, Keizo

AU - Takebe, Masahiro

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AB - The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.

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Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39

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