Abstract
The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.
| Original language | English |
|---|---|
| Pages (from-to) | 461-467 |
| Number of pages | 7 |
| Journal | Radiation Physics and Chemistry |
| Volume | 53 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1998 Nov 1 |
ASJC Scopus subject areas
- Radiation
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Hamano, T., Hirao, T., Nashiyama, I., Sakai, T., Kamiya, T., Ishii, K., & Takebe, M. (1998). Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39. Radiation Physics and Chemistry, 53(5), 461-467. https://doi.org/10.1016/S0969-806X(98)00133-9