Development of thermoelectric microdevices by combining materials processing and silicon micromachining technology

J. F. Li, R. Watanabe, S. Sugimoto, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thermoelectric microgenerators and microcoolers are becoming technologically important for microelectromechanical systems (MEMS), but the conventional cutting and assembling techniques have some limitation in miniaturizing the dimensions of thermoelectric devices to the micrometer order. We have combined powder processing and silicon micromachining to manufacture thermoelectric micro-modules with densely aligned fine and high-aspect-ratio P-N elements. Microrod arrays of 300□m tall and 40□m square of P-type Bi-Sb-Te thermoelectric alloy were successfully fabricated using the micromachined Si molds.

Original languageEnglish
Title of host publicationMechanics and Material Engineering for Science and Experiments
EditorsY. Zhou, Y. Ghu, Z. Li, Y. Zhou, Y. Gu, Z. Li
Pages205-208
Number of pages4
Publication statusPublished - 2003 Oct 17
EventProceedings of the International Symposium of Young Scholars on Mechanics and Material Engineering for Science and Experiments - Changsha/Zhangjiajie, China
Duration: 2001 Aug 112001 Aug 16

Publication series

NameMechanics and Material Engineering for Science and Experiments

Other

OtherProceedings of the International Symposium of Young Scholars on Mechanics and Material Engineering for Science and Experiments
CountryChina
CityChangsha/Zhangjiajie
Period01/8/1101/8/16

Keywords

  • Bi-Sb-Te alloy
  • Microrod array
  • Silicon micromachining
  • Thermoelectric, micro-module

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering

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