@inproceedings{c22971169d8d48369ab9625d7be8d53c,
title = "Development of thermoelectric microdevices by combining materials processing and silicon micromachining technology",
abstract = "Thermoelectric microgenerators and microcoolers are becoming technologically important for microelectromechanical systems (MEMS), but the conventional cutting and assembling techniques have some limitation in miniaturizing the dimensions of thermoelectric devices to the micrometer order. We have combined powder processing and silicon micromachining to manufacture thermoelectric micro-modules with densely aligned fine and high-aspect-ratio P-N elements. Microrod arrays of 300□m tall and 40□m square of P-type Bi-Sb-Te thermoelectric alloy were successfully fabricated using the micromachined Si molds.",
keywords = "Bi-Sb-Te alloy, Microrod array, Silicon micromachining, Thermoelectric, micro-module",
author = "Li, {J. F.} and R. Watanabe and S. Sugimoto and S. Tanaka and M. Esashi",
year = "2003",
language = "English",
isbn = "1880132796",
series = "Mechanics and Material Engineering for Science and Experiments",
pages = "205--208",
editor = "Y. Zhou and Y. Ghu and Z. Li and Y. Zhou and Y. Gu and Z. Li",
booktitle = "Mechanics and Material Engineering for Science and Experiments",
note = "Proceedings of the International Symposium of Young Scholars on Mechanics and Material Engineering for Science and Experiments ; Conference date: 11-08-2001 Through 16-08-2001",
}