Development of the three-electrode hollow cathode glow discharge lamp and its emission characteristics

Kenji Kodama, Kazuaki Wagatsuma

Research output: Contribution to journalArticlepeer-review

Abstract

A new three-electrode hollow cathode glow discharge lamp and a measuring technique were developed so that the sputtering process and emission process can be separated individually. The modulation technique was applied to the processes for creating a hollow cathode plasma as well as sputtering a sample. To detect specific emission lines of sample atoms from the overall signals, we used a Fast Fourier Transfer (FFT) spectrum analyzer. We could determine the bias voltages under the optimum discharge conditions for measuring the emission signal of the sample selectively by reading the component of the sputtering frequency in the FFT power spectrum. A three-electrode hollow cathode glow discharge lamp with an FFT spectrum analyzer is a promising analytical method for microanalysis.

Original languageEnglish
Pages (from-to)749-755
Number of pages7
JournalBUNSEKI KAGAKU
Volume55
Issue number10
DOIs
Publication statusPublished - 2006

Keywords

  • Atomic emission spectrometry
  • Fast Fourier Transfer spectrum analyzer
  • Glow discharge
  • Hollow cathode plasma
  • Modulation technique

ASJC Scopus subject areas

  • Analytical Chemistry

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