Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film

Jae Wung Lee, Yu Ching Lin, Neelam Kaushik, Parmanand Sharma, Akihisa Inoue, Masayoshi Esashi, Thomas Gessner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In order to realize the large tilting angle of micro-mirror devices without mechanical failure, the mirror structure was fabricated using a Fe-based metallic glass (MG) thin film. The micro-mirrors with mirror-plate diameter of 900m and torsion bar dimensions; length 250m, width 30m and thickness 3m were fabricated. Extremely large tilting angle of 270 was obtained on activation of mirror by using a permanent magnet. And when 93mA was applied to the driving set-up using Lorentz force, over 75 of mechanical angle was obtained. Large tilting angle of micro-mirror is due to the torsion bar which was fabricated with Fe-based MG thin film that has large elastic strain limit, excellent magnetic and mechanical properties.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2912-2915
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • MEMS
  • Metallic glass
  • Micro-mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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