Development of Si neural probe with microfluidic channel fabricated using wafer direct bonding

Soichiro Kanno, Risato Kobayashi, Lee Sanghoon, Bea Jicheol, Takafumi Fukushima, Kazuhiro Sakamoto, Norihiro Katayama, Hajime Mushiake, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


This paper reports the development of a novel Si neural probe with a microfluidic channel to deliver drugs into neural tissue. We fabricated this Si neural probe using wafer direct bonding. To confirm the fluidic capability of the fabricated Si probe, we demonstrated the ejection of liquid from the microfluidic channel using a syringe pump. We confirmed that the Si probe had sufficient bonding strength to eject liquid. In addition, we investigated the pressure drops in the microfluidic channel. From the results, we observed a linear relationship between the flow rate and the pressure drop. Since this result agreed well with the calculated values, we confirmed that the microfluidic channel was successfully formed by wafer direct bonding.

Original languageEnglish
Article number04C189
JournalJapanese journal of applied physics
Issue number4 PART 2
Publication statusPublished - 2009 Apr

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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