Development of scanning-type X-ray fourier transform holography

K. Nomura, N. Awaji, S. Doi, S. Isogami, K. Kodama, T. Nakamura, M. Suzuki, M. Tsunoda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a scanning-type x-ray Fourier transform holography and applied it to both the soft and hard x-ray regions. For this approach, we prepared the holography mask and the imaging object separately and placed them in contact with each other. In this configuration, the illuminated area can be changed by moving the sample relative to the mask via the translation stage. In this case, an image can be recovered by Fourier inversion of the hologram as in the usual lensless Fourier transform holography. This method also reduces the relative vibration between the mask and sample, and provides good quality images. The method was successfully applied to large-area imaging of magnetic domains in a Co/Pt perpendicular magnetic film with soft x-rays. In addition, cross-sectional imaging of Cu interconnect lines was performed in the hard x-ray region.

Original languageEnglish
Title of host publication10th International Conference on X-Ray Microscopy
Pages277-280
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event10th International Conference on X-Ray Microscopy - Chicago, IL, United States
Duration: 2010 Aug 152010 Aug 20

Publication series

NameAIP Conference Proceedings
Volume1365
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other10th International Conference on X-Ray Microscopy
CountryUnited States
CityChicago, IL
Period10/8/1510/8/20

Keywords

  • X-ray Fourier transform holography
  • hard x-ray
  • imaging
  • magnetic domain
  • soft x-ray

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Development of scanning-type X-ray fourier transform holography'. Together they form a unique fingerprint.

Cite this