Development of scanning microwave microscope with a lumped-constant resonator probe for high-throughput characterization of combinatorial dielectric materials

Noriaki Okazaki, Hiroyuki Odagawa, Yasuo Cho, Toshihiko Nagamura, Daisuke Komiyama, Takashi Koida, Hideki Minami, Parhat Ahmet, Tomoteru Fukumura, Yuji Matsumoto, Masashi Kawasaki, Toyohiro Chikyow, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Abstract

A scanning microwave microscope (SμM) for combinatorial characterization of dielectric materials has been developed using a lumped-constant resonator probe. The probe consists of a commercially available microwave oscillator module equipped with a thin conducting needle and an outer conductor ring. The capacitance between needle and ring changes with the dielectric constant of the sample just beneath the needle, which can be detected as a frequency shift of the resonator with high accuracy. The frequency shift values measured for various standard samples lay on a master curve theoretically predicted, which guarantees the quantitative evaluation of the dielectric constant. Applicability of the present system to the characterization of combinatorial samples is demonstrated.

Original languageEnglish
Pages (from-to)222-226
Number of pages5
JournalApplied Surface Science
Volume189
Issue number3-4
DOIs
Publication statusPublished - 2002 Apr 28

Keywords

  • Composition-spread thin film
  • Dielectric constant
  • Scanning microwave microscope
  • Temperature-gradient pulsed laser deposition technique

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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