Development of scanning microwave microscope for high-throughput characterization of combinatorial dielectric thin film

Noriaki Okazaki, Parhat Ahmet, Toyohiro Chikyow, Hiroyuki Odagawa, Yasuo Cho, Tomoteru Fukumura, Masashi Kawasaki, Makoto Ohtani, Hideomi Koinuma, Tetsuya Hasegawa

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