Development of scanning microwave microscope for high-throughput characterization of combinatorial dielectric thin film

Noriaki Okazaki, Parhat Ahmet, Toyohiro Chikyow, Hiroyuki Odagawa, Yasuo Cho, Tomoteru Fukumura, Masashi Kawasaki, Makoto Ohtani, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A scanning microwave microscope (SμM) for high-throughput characterization of combinatorial dielectric materials has been developed using a lumped constant resonator probe. The probe consists of a microwave oscillator module equipped with a thin conducting needle and an outer conductor ring, which detects the dielectric constant of the sample just beneath the needle as a frequency shift of the resonator. The quantitative analysis of the dielectric constant for the bulk and the thin-film samples was carried out based on the measurement of gap-length dependence of the frequency shift. The analysis method was successfully applied to the characterization of composition-spread BaxSr1-xTiO3 thin film sample. The evaluation of far-field contribution to the frequency shift was found to be crucial for the accurate determination of dielectric constant especially in the characterization of combinatorial thin films.

Original languageEnglish
Pages (from-to)119-124
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume700
Publication statusPublished - 2002 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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