@article{7f0456cfc77e40a9a9dea8421ac5bfe9,
title = "Development of QTAT online electronic circuit patterning system",
abstract = "An arbitrary pattern exposure system has been developed by employing a liquid crystal display (LCD) with 1600 × 1200 pixels for the formation of projection images in place of a conventional reticle. The minimum pattern size becomes 11.5 μm, which corresponds to the aperture size of each pixel on the LCD. For the purpose of quick turnaround time (TAT), the exposure system was directly connected to the circuit design system with the transmission control protocol/internet protocol network. From the experimental results on patterning of a typical electronic circuit data with the area of 46 × 46 mm, it was confirmed that the TAT from the output of design data to the finish of the exposure becomes less than 28 min. By using this system, reduction of the production cost in the printed wiring boards fabrication is expected.",
keywords = "Liquid crystal display (LCD), Lithography, Printed circuits",
author = "Katsuhiko Wakasugi and Satoshi Wakimoto and Takayuki Akamichi and Akira Nakada and Hiroshi Kubota and Tsuneo Inokuchi and Shinji Suzuki and Sou Aikawa and Kouji Kosaka and Kazumitsu Nakamura and Tatsuo Morimoto",
note = "Funding Information: Manuscript received February 15, 2005; revised February 17, 2005. This work was supported by the Kyushu Bureau of Economy, Trade and Industry, Japan. K. Wakasugi, S. Wakimoto, T. Akamichi, A. Nakada, and H. Kubota are with Graduate School of Science and Technology, Kumamoto University, Kumamoto 860-8555, Japan (e-mail: devicegrad@eecs.kumamoto-u.ac.jp). T. Inokuchi is with Kumamoto Technology Center, Sony Semiconductor Kyushu Corporation, Kumamoto 869-1102, Japan (e-mail: Inokuchi@jp.sony.com). S. Suzuki is with Ushio, Inc., Yokohama 225-0002, Japan (e-mail: s.suzuki@ushio.co.jp). S. Aikawa is with Tecnos Co., Ltd., Nara 630-8113, Japan (e-mail: aikawa@tecnos-net.co.jp). K. Kosaka is with Kumamoto Technology, Inc., Kumamoto 861-2202, Japan (e-mail: kosaka_kouji@technologies.co.jp). K. Nakamura is with Kumamoto Technology and Industry Foundation, Kumamoto 861-2202, Japan (e-mail: nakamurak@kmt-ti.or.jp). T. Morimoto is with the New Industry Creation Hatchery Center, Tohoku University, Sendai 980-8579, Japan (e-mail: morimoto@fff.niche.tohoku.ac.jp). Digital Object Identifier 10.1109/TSM.2005.858547",
year = "2005",
month = nov,
doi = "10.1109/TSM.2005.858547",
language = "English",
volume = "18",
pages = "487--493",
journal = "IEEE Transactions on Semiconductor Manufacturing",
issn = "0894-6507",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4",
}