To study the hydrogen isotopes plasma driven permeation (PDP) behavior in plasma facing materials, a linear Radio Frequency (RF) plasma device has been constructed in the radiation controlled area at Shizuoka University. The deuterium (D) plasma is generated by injecting RF power with the frequency of 13.56 MHz through a copper antenna and confined by DC magnetic field. The sample is sealed by gold (Au) coated O-ring and one side (upstream side) of sample is exposed to the D plasma. The other side of sample, named as downstream side, is pumped out by a turbo molecular pump and a rotary pump. The permeated D through the sample is monitored by a quadrupole mass spectrometer (QMS) which is connected to the downstream chamber. Infrared heater is adopted to control the sample temperature. The PDP experiments under different plasma parameters show that the permeation process agrees with RD regime. The D recombination coefficient on upstream surface of W is obtained.