Development of packed column for surface acoustic wave gas chromatograph using anodically bonded silicon-glass structure with a compression jacket

Yutaro Yamamoto, Shingo Akao, Masanori Sakuma, Kentaro Kobari, Kazuhiro Noguchi, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Gas or liquid chromatographs (GC/LCs) are frequently used for multiple-compound sensing, but they are too large and heavy to be portable. To provide a handy GC/LC, many groups have proposed micro GC/LCs in which large columns are replaced by small microelectro-mechanical-system (MEMS) columns. However, because of the high packing pressure, a packed MEMS column using an anodically bonded structure has not been realized so far. In this study, we realized such a MEMS column for the first time by introducing a compression jacket to reduce the tensile stress at the silicon-glass boundary. Consequently we succeeded in the separation and detection of lower hydrocarbons using a ball surface acoustic wave sensor.

Original languageEnglish
Article number07GG12
JournalJapanese journal of applied physics
Volume48
Issue number7 PART 2
DOIs
Publication statusPublished - 2009 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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