Development of new tight-binding molecular dynamics program to simulate chemical-mechanical polishing processes

Toshiyuki Yokosuka, Hitoshi Kurokawa, Seiichi Takami, Momoji Kubo, Akira Miyamoto, Akira Imamura

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy