Development of multilayer laue lenses; (2) circular type

T. Koyama, T. Tsuji, Hidekazu Takano, Y. Kagoshima, S. Ichimaru, T. Ohchi, H. Takenaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)


A circular type multilayer Laue lens (MLL) has been designed and fabricated. A graded-thickness multilayer was deposited on a tapered wire core by using a magnetron sputtering system. A combination of MoSi 2 and Si was chosen as the multilayer materials owing to its superior properties of high diffraction efficiency and relatively sharp interfaces between layers. Optical properties of the circular type MLL were measured at BL24XU of SPring-8 with 20-keV x-rays. It was confirmed that only the +first-order diffraction was focused in the focal point owing to the wedged zone structure. Measured +first-order diffraction efficiency of the multilayer part was as high as 52%. Applying the circular type MLL to scanning transmission microscopy, a 50-nm line and space of a test chart was resolved.

Original languageEnglish
Title of host publication10th International Conference on X-Ray Microscopy
Number of pages4
Publication statusPublished - 2010 Dec 1
Externally publishedYes
Event10th International Conference on X-Ray Microscopy - Chicago, IL, United States
Duration: 2010 Aug 152010 Aug 20

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other10th International Conference on X-Ray Microscopy
Country/TerritoryUnited States
CityChicago, IL


  • high diffraction efficiency
  • multilayer Laue lens
  • nano-focusing
  • zone plate

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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