Development of multilayer laue lenses; (1) linear type

T. Koyama, H. Takenaka, S. Ichimaru, T. Ohchi, T. Tsuji, H. Takano, Y. Kagoshima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Citations (Scopus)


A multilayer Laue lens (MLL) made from MoSi2/Si has been fabricated aiming at a sub-10-nm spatial resolution for hard x-ray microscopy. A multilayer of 1000 alternating MoSi2 and Si layers with a layer thickness gradually increasing from 5 nm to 316 nm according to the Fresnel lens structure was deposited on a silicon substrate using DC magnetron sputtering, and then the substrate was diced, polished and thinned. The multilayer total thickness was about 10 μm. Optical properties were measured at the SPring-8 beamline BL24XU using 20-keV x-rays. While observing changes in far-field diffraction patterns by changing the tilt angle of the MLL, a dynamical diffraction effect of the MLL was visually confirmed. The achieved line focusing size was 13.1 nm, which is the best ever reported by using an MLL. The maximum local diffraction efficiency was measured to be 62%. Further, two MLLs were arranged in the KB configuration and applied to scanning transmission microscopy.

Original languageEnglish
Title of host publication10th International Conference on X-Ray Microscopy
Number of pages4
Publication statusPublished - 2010 Dec 1
Externally publishedYes
Event10th International Conference on X-Ray Microscopy - Chicago, IL, United States
Duration: 2010 Aug 152010 Aug 20

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other10th International Conference on X-Ray Microscopy
Country/TerritoryUnited States
CityChicago, IL


  • Multilayer Laue lens
  • diffraction efficiency
  • spatial resolution
  • x-ray microscopy

ASJC Scopus subject areas

  • Ecology, Evolution, Behavior and Systematics
  • Ecology
  • Plant Science
  • Physics and Astronomy(all)
  • Nature and Landscape Conservation


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