TY - GEN
T1 - Development of multilayer laue lenses; (1) linear type
AU - Koyama, T.
AU - Takenaka, H.
AU - Ichimaru, S.
AU - Ohchi, T.
AU - Tsuji, T.
AU - Takano, H.
AU - Kagoshima, Y.
PY - 2010/12/1
Y1 - 2010/12/1
N2 - A multilayer Laue lens (MLL) made from MoSi2/Si has been fabricated aiming at a sub-10-nm spatial resolution for hard x-ray microscopy. A multilayer of 1000 alternating MoSi2 and Si layers with a layer thickness gradually increasing from 5 nm to 316 nm according to the Fresnel lens structure was deposited on a silicon substrate using DC magnetron sputtering, and then the substrate was diced, polished and thinned. The multilayer total thickness was about 10 μm. Optical properties were measured at the SPring-8 beamline BL24XU using 20-keV x-rays. While observing changes in far-field diffraction patterns by changing the tilt angle of the MLL, a dynamical diffraction effect of the MLL was visually confirmed. The achieved line focusing size was 13.1 nm, which is the best ever reported by using an MLL. The maximum local diffraction efficiency was measured to be 62%. Further, two MLLs were arranged in the KB configuration and applied to scanning transmission microscopy.
AB - A multilayer Laue lens (MLL) made from MoSi2/Si has been fabricated aiming at a sub-10-nm spatial resolution for hard x-ray microscopy. A multilayer of 1000 alternating MoSi2 and Si layers with a layer thickness gradually increasing from 5 nm to 316 nm according to the Fresnel lens structure was deposited on a silicon substrate using DC magnetron sputtering, and then the substrate was diced, polished and thinned. The multilayer total thickness was about 10 μm. Optical properties were measured at the SPring-8 beamline BL24XU using 20-keV x-rays. While observing changes in far-field diffraction patterns by changing the tilt angle of the MLL, a dynamical diffraction effect of the MLL was visually confirmed. The achieved line focusing size was 13.1 nm, which is the best ever reported by using an MLL. The maximum local diffraction efficiency was measured to be 62%. Further, two MLLs were arranged in the KB configuration and applied to scanning transmission microscopy.
KW - Multilayer Laue lens
KW - diffraction efficiency
KW - spatial resolution
KW - x-ray microscopy
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U2 - 10.1063/1.3625296
DO - 10.1063/1.3625296
M3 - Conference contribution
AN - SCOPUS:80053308358
SN - 9780735409255
T3 - AIP Conference Proceedings
SP - 24
EP - 27
BT - 10th International Conference on X-Ray Microscopy
T2 - 10th International Conference on X-Ray Microscopy
Y2 - 15 August 2010 through 20 August 2010
ER -